10/16/2012	2:06:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2012	2:06:35 PM	Recipe started at 2:06 PM
10/16/2012	2:06:35 PM	Helium valve closed
10/16/2012	2:06:35 PM	H2 valve closed
10/16/2012	2:06:35 PM	BCl3 valve closed
10/16/2012	2:06:35 PM	PH3 valve closed
10/16/2012	2:06:35 PM	SiCl4 pre valve closed
10/16/2012	2:06:35 PM	SiCl4 post valve closed
10/16/2012	2:06:35 PM	Main Vac valve closed
10/16/2012	2:06:35 PM	Bypass valve closed
10/16/2012	2:06:35 PM	Bubbler valve closed
10/16/2012	2:06:35 PM	Helium MFC set to  0.000000
10/16/2012	2:06:35 PM	H2 MFC set to  0.000000
10/16/2012	2:06:35 PM	BCl3 MFC set to  0.000000
10/16/2012	2:06:35 PM	PH3 MFC set to  0.000000
10/16/2012	2:06:35 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:06:35 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:06:35 PM	Tube furnace set to 0
10/16/2012	2:06:38 PM	H2 valve closed
10/16/2012	2:06:38 PM	BCl3 valve closed
10/16/2012	2:06:38 PM	PH3 valve closed
10/16/2012	2:06:38 PM	SiCl4 pre valve closed
10/16/2012	2:06:38 PM	SiCl4 post valve closed
10/16/2012	2:06:38 PM	Main Vac valve closed
10/16/2012	2:06:38 PM	Bypass valve closed
10/16/2012	2:06:38 PM	Bubbler valve closed
10/16/2012	2:06:38 PM	Helium valve opened
10/16/2012	2:06:38 PM	Helium MFC set to  500.000000
10/16/2012	2:06:38 PM	H2 MFC set to  0.000000
10/16/2012	2:06:38 PM	BCl3 MFC set to  0.000000
10/16/2012	2:06:38 PM	PH3 MFC set to  0.000000
10/16/2012	2:06:38 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:06:38 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:06:39 PM	Tube furnace set to 0
10/16/2012	2:07:51 PM	Helium valve closed
10/16/2012	2:07:51 PM	H2 valve closed
10/16/2012	2:07:51 PM	BCl3 valve closed
10/16/2012	2:07:51 PM	PH3 valve closed
10/16/2012	2:07:51 PM	SiCl4 pre valve closed
10/16/2012	2:07:51 PM	SiCl4 post valve closed
10/16/2012	2:07:51 PM	Main Vac valve closed
10/16/2012	2:07:51 PM	Bypass valve closed
10/16/2012	2:07:51 PM	Bubbler valve closed
10/16/2012	2:07:51 PM	Helium MFC set to  0.000000
10/16/2012	2:07:51 PM	H2 MFC set to  0.000000
10/16/2012	2:07:51 PM	BCl3 MFC set to  0.000000
10/16/2012	2:07:51 PM	PH3 MFC set to  0.000000
10/16/2012	2:07:51 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:07:51 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:07:52 PM	Tube furnace set to 0
10/16/2012	2:07:53 PM	Run finished at 2:07 PM
10/16/2012	2:07:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2012	2:10:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2012	2:10:46 PM	Recipe started at 2:10 PM
10/16/2012	2:10:46 PM	Helium valve closed
10/16/2012	2:10:46 PM	H2 valve closed
10/16/2012	2:10:46 PM	BCl3 valve closed
10/16/2012	2:10:46 PM	PH3 valve closed
10/16/2012	2:10:46 PM	SiCl4 pre valve closed
10/16/2012	2:10:46 PM	SiCl4 post valve closed
10/16/2012	2:10:46 PM	Main Vac valve closed
10/16/2012	2:10:46 PM	Bubbler valve closed
10/16/2012	2:10:46 PM	Bypass valve opened
10/16/2012	2:10:46 PM	Helium MFC set to  0.000000
10/16/2012	2:10:46 PM	H2 MFC set to  0.000000
10/16/2012	2:10:46 PM	BCl3 MFC set to  0.000000
10/16/2012	2:10:46 PM	PH3 MFC set to  0.000000
10/16/2012	2:10:46 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:10:46 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:10:46 PM	Tube furnace set to 0
10/16/2012	2:12:12 PM	Helium valve closed
10/16/2012	2:12:12 PM	H2 valve closed
10/16/2012	2:12:12 PM	BCl3 valve closed
10/16/2012	2:12:12 PM	PH3 valve closed
10/16/2012	2:12:12 PM	SiCl4 pre valve closed
10/16/2012	2:12:12 PM	SiCl4 post valve closed
10/16/2012	2:12:12 PM	Main Vac valve closed
10/16/2012	2:12:12 PM	Bubbler valve closed
10/16/2012	2:12:12 PM	Bypass valve opened
10/16/2012	2:12:12 PM	Helium MFC set to  0.000000
10/16/2012	2:12:12 PM	H2 MFC set to  0.000000
10/16/2012	2:12:12 PM	BCl3 MFC set to  0.000000
10/16/2012	2:12:12 PM	PH3 MFC set to  0.000000
10/16/2012	2:12:12 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:12:12 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:12:12 PM	Tube furnace set to 0
10/16/2012	2:13:12 PM	Helium valve closed
10/16/2012	2:13:12 PM	H2 valve closed
10/16/2012	2:13:12 PM	BCl3 valve closed
10/16/2012	2:13:12 PM	PH3 valve closed
10/16/2012	2:13:12 PM	SiCl4 pre valve closed
10/16/2012	2:13:12 PM	SiCl4 post valve closed
10/16/2012	2:13:12 PM	Bypass valve closed
10/16/2012	2:13:12 PM	Bubbler valve closed
10/16/2012	2:13:12 PM	Main Vac valve opened
10/16/2012	2:13:12 PM	Helium MFC set to  0.000000
10/16/2012	2:13:12 PM	H2 MFC set to  0.000000
10/16/2012	2:13:12 PM	BCl3 MFC set to  0.000000
10/16/2012	2:13:12 PM	PH3 MFC set to  0.000000
10/16/2012	2:13:12 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:13:12 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:13:12 PM	Tube furnace set to 0
10/16/2012	2:13:13 PM	Run finished at 2:13 PM
10/16/2012	2:13:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2012	2:14:24 PM	Tube furnace set to 200
10/16/2012	2:21:23 PM	Recipe started at 2:21 PM
10/16/2012	2:21:23 PM	Helium valve closed
10/16/2012	2:21:23 PM	H2 valve closed
10/16/2012	2:21:23 PM	BCl3 valve closed
10/16/2012	2:21:23 PM	PH3 valve closed
10/16/2012	2:21:23 PM	SiCl4 pre valve closed
10/16/2012	2:21:23 PM	SiCl4 post valve closed
10/16/2012	2:21:23 PM	Bypass valve closed
10/16/2012	2:21:23 PM	Bubbler valve closed
10/16/2012	2:21:23 PM	Main Vac valve opened
10/16/2012	2:21:23 PM	Helium MFC set to  0.000000
10/16/2012	2:21:23 PM	H2 MFC set to  0.000000
10/16/2012	2:21:23 PM	BCl3 MFC set to  0.000000
10/16/2012	2:21:23 PM	PH3 MFC set to  0.000000
10/16/2012	2:21:23 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:21:23 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:21:23 PM	Tube furnace set to 0
10/16/2012	2:21:53 PM	H2 valve closed
10/16/2012	2:21:53 PM	BCl3 valve closed
10/16/2012	2:21:53 PM	PH3 valve closed
10/16/2012	2:21:53 PM	SiCl4 pre valve closed
10/16/2012	2:21:53 PM	SiCl4 post valve closed
10/16/2012	2:21:53 PM	Bypass valve closed
10/16/2012	2:21:53 PM	Bubbler valve closed
10/16/2012	2:21:53 PM	Helium valve opened
10/16/2012	2:21:53 PM	Main Vac valve opened
10/16/2012	2:21:53 PM	Helium MFC set to  20.000000
10/16/2012	2:21:53 PM	H2 MFC set to  0.000000
10/16/2012	2:21:53 PM	BCl3 MFC set to  0.000000
10/16/2012	2:21:53 PM	PH3 MFC set to  0.000000
10/16/2012	2:21:53 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:21:53 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:21:54 PM	Tube furnace set to 0
10/16/2012	2:22:24 PM	Helium valve closed
10/16/2012	2:22:24 PM	H2 valve closed
10/16/2012	2:22:24 PM	BCl3 valve closed
10/16/2012	2:22:24 PM	PH3 valve closed
10/16/2012	2:22:24 PM	SiCl4 pre valve closed
10/16/2012	2:22:24 PM	SiCl4 post valve closed
10/16/2012	2:22:24 PM	Bypass valve closed
10/16/2012	2:22:24 PM	Bubbler valve closed
10/16/2012	2:22:24 PM	Main Vac valve opened
10/16/2012	2:22:24 PM	Helium MFC set to  0.000000
10/16/2012	2:22:24 PM	H2 MFC set to  0.000000
10/16/2012	2:22:24 PM	BCl3 MFC set to  0.000000
10/16/2012	2:22:24 PM	PH3 MFC set to  0.000000
10/16/2012	2:22:24 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:22:24 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:22:24 PM	Tube furnace set to 0
10/16/2012	2:22:54 PM	H2 valve closed
10/16/2012	2:22:54 PM	BCl3 valve closed
10/16/2012	2:22:54 PM	PH3 valve closed
10/16/2012	2:22:54 PM	SiCl4 pre valve closed
10/16/2012	2:22:54 PM	SiCl4 post valve closed
10/16/2012	2:22:54 PM	Bypass valve closed
10/16/2012	2:22:54 PM	Bubbler valve closed
10/16/2012	2:22:54 PM	Helium valve opened
10/16/2012	2:22:54 PM	Main Vac valve opened
10/16/2012	2:22:54 PM	Helium MFC set to  20.000000
10/16/2012	2:22:54 PM	H2 MFC set to  0.000000
10/16/2012	2:22:54 PM	BCl3 MFC set to  0.000000
10/16/2012	2:22:54 PM	PH3 MFC set to  0.000000
10/16/2012	2:22:54 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:22:54 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:22:54 PM	Tube furnace set to 0
10/16/2012	2:23:24 PM	Helium valve closed
10/16/2012	2:23:24 PM	H2 valve closed
10/16/2012	2:23:24 PM	BCl3 valve closed
10/16/2012	2:23:24 PM	PH3 valve closed
10/16/2012	2:23:24 PM	SiCl4 pre valve closed
10/16/2012	2:23:24 PM	SiCl4 post valve closed
10/16/2012	2:23:24 PM	Bypass valve closed
10/16/2012	2:23:24 PM	Bubbler valve closed
10/16/2012	2:23:24 PM	Main Vac valve opened
10/16/2012	2:23:24 PM	Helium MFC set to  0.000000
10/16/2012	2:23:24 PM	H2 MFC set to  0.000000
10/16/2012	2:23:24 PM	BCl3 MFC set to  0.000000
10/16/2012	2:23:24 PM	PH3 MFC set to  0.000000
10/16/2012	2:23:24 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:23:24 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:23:24 PM	Tube furnace set to 0
10/16/2012	2:23:54 PM	H2 valve closed
10/16/2012	2:23:54 PM	BCl3 valve closed
10/16/2012	2:23:54 PM	PH3 valve closed
10/16/2012	2:23:54 PM	SiCl4 pre valve closed
10/16/2012	2:23:54 PM	SiCl4 post valve closed
10/16/2012	2:23:54 PM	Bypass valve closed
10/16/2012	2:23:54 PM	Bubbler valve closed
10/16/2012	2:23:54 PM	Helium valve opened
10/16/2012	2:23:54 PM	Main Vac valve opened
10/16/2012	2:23:54 PM	Helium MFC set to  20.000000
10/16/2012	2:23:54 PM	H2 MFC set to  0.000000
10/16/2012	2:23:54 PM	BCl3 MFC set to  0.000000
10/16/2012	2:23:54 PM	PH3 MFC set to  0.000000
10/16/2012	2:23:54 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:23:54 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:23:54 PM	Tube furnace set to 0
10/16/2012	2:24:25 PM	Helium valve closed
10/16/2012	2:24:25 PM	H2 valve closed
10/16/2012	2:24:25 PM	BCl3 valve closed
10/16/2012	2:24:25 PM	PH3 valve closed
10/16/2012	2:24:25 PM	SiCl4 pre valve closed
10/16/2012	2:24:25 PM	SiCl4 post valve closed
10/16/2012	2:24:25 PM	Bypass valve closed
10/16/2012	2:24:25 PM	Bubbler valve closed
10/16/2012	2:24:25 PM	Main Vac valve opened
10/16/2012	2:24:25 PM	Helium MFC set to  0.000000
10/16/2012	2:24:25 PM	H2 MFC set to  0.000000
10/16/2012	2:24:25 PM	BCl3 MFC set to  0.000000
10/16/2012	2:24:25 PM	PH3 MFC set to  0.000000
10/16/2012	2:24:25 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:24:25 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:24:25 PM	Tube furnace set to 0
10/16/2012	2:24:55 PM	H2 valve closed
10/16/2012	2:24:55 PM	BCl3 valve closed
10/16/2012	2:24:55 PM	PH3 valve closed
10/16/2012	2:24:55 PM	SiCl4 pre valve closed
10/16/2012	2:24:55 PM	SiCl4 post valve closed
10/16/2012	2:24:55 PM	Bypass valve closed
10/16/2012	2:24:55 PM	Bubbler valve closed
10/16/2012	2:24:55 PM	Helium valve opened
10/16/2012	2:24:55 PM	Main Vac valve opened
10/16/2012	2:24:55 PM	Helium MFC set to  20.000000
10/16/2012	2:24:55 PM	H2 MFC set to  0.000000
10/16/2012	2:24:55 PM	BCl3 MFC set to  0.000000
10/16/2012	2:24:55 PM	PH3 MFC set to  0.000000
10/16/2012	2:24:55 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:24:55 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:24:55 PM	Tube furnace set to 0
10/16/2012	2:25:25 PM	Helium valve closed
10/16/2012	2:25:25 PM	H2 valve closed
10/16/2012	2:25:25 PM	BCl3 valve closed
10/16/2012	2:25:25 PM	PH3 valve closed
10/16/2012	2:25:25 PM	SiCl4 pre valve closed
10/16/2012	2:25:25 PM	SiCl4 post valve closed
10/16/2012	2:25:25 PM	Bypass valve closed
10/16/2012	2:25:25 PM	Bubbler valve closed
10/16/2012	2:25:25 PM	Main Vac valve opened
10/16/2012	2:25:25 PM	Helium MFC set to  0.000000
10/16/2012	2:25:25 PM	H2 MFC set to  0.000000
10/16/2012	2:25:25 PM	BCl3 MFC set to  0.000000
10/16/2012	2:25:25 PM	PH3 MFC set to  0.000000
10/16/2012	2:25:25 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:25:25 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:25:25 PM	Tube furnace set to 0
10/16/2012	2:25:55 PM	H2 valve closed
10/16/2012	2:25:55 PM	BCl3 valve closed
10/16/2012	2:25:55 PM	PH3 valve closed
10/16/2012	2:25:55 PM	SiCl4 pre valve closed
10/16/2012	2:25:55 PM	SiCl4 post valve closed
10/16/2012	2:25:55 PM	Bypass valve closed
10/16/2012	2:25:55 PM	Bubbler valve closed
10/16/2012	2:25:55 PM	Helium valve opened
10/16/2012	2:25:55 PM	Main Vac valve opened
10/16/2012	2:25:55 PM	Helium MFC set to  20.000000
10/16/2012	2:25:55 PM	H2 MFC set to  0.000000
10/16/2012	2:25:55 PM	BCl3 MFC set to  0.000000
10/16/2012	2:25:55 PM	PH3 MFC set to  0.000000
10/16/2012	2:25:55 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:25:55 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:25:55 PM	Tube furnace set to 0
10/16/2012	2:26:25 PM	Helium valve closed
10/16/2012	2:26:26 PM	H2 valve closed
10/16/2012	2:26:26 PM	BCl3 valve closed
10/16/2012	2:26:26 PM	PH3 valve closed
10/16/2012	2:26:26 PM	SiCl4 pre valve closed
10/16/2012	2:26:26 PM	SiCl4 post valve closed
10/16/2012	2:26:26 PM	Bypass valve closed
10/16/2012	2:26:26 PM	Bubbler valve closed
10/16/2012	2:26:26 PM	Main Vac valve opened
10/16/2012	2:26:26 PM	Helium MFC set to  0.000000
10/16/2012	2:26:26 PM	H2 MFC set to  0.000000
10/16/2012	2:26:26 PM	BCl3 MFC set to  0.000000
10/16/2012	2:26:26 PM	PH3 MFC set to  0.000000
10/16/2012	2:26:26 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:26:26 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:26:26 PM	Tube furnace set to 0
10/16/2012	2:26:56 PM	H2 valve closed
10/16/2012	2:26:56 PM	BCl3 valve closed
10/16/2012	2:26:56 PM	PH3 valve closed
10/16/2012	2:26:56 PM	SiCl4 pre valve closed
10/16/2012	2:26:56 PM	SiCl4 post valve closed
10/16/2012	2:26:56 PM	Bypass valve closed
10/16/2012	2:26:56 PM	Bubbler valve closed
10/16/2012	2:26:56 PM	Helium valve opened
10/16/2012	2:26:56 PM	Main Vac valve opened
10/16/2012	2:26:56 PM	Helium MFC set to  20.000000
10/16/2012	2:26:56 PM	H2 MFC set to  0.000000
10/16/2012	2:26:56 PM	BCl3 MFC set to  0.000000
10/16/2012	2:26:56 PM	PH3 MFC set to  0.000000
10/16/2012	2:26:56 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:26:56 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:26:56 PM	Tube furnace set to 0
10/16/2012	2:27:26 PM	Helium valve closed
10/16/2012	2:27:26 PM	H2 valve closed
10/16/2012	2:27:26 PM	BCl3 valve closed
10/16/2012	2:27:26 PM	PH3 valve closed
10/16/2012	2:27:26 PM	SiCl4 pre valve closed
10/16/2012	2:27:26 PM	SiCl4 post valve closed
10/16/2012	2:27:26 PM	Bypass valve closed
10/16/2012	2:27:26 PM	Bubbler valve closed
10/16/2012	2:27:26 PM	Main Vac valve opened
10/16/2012	2:27:26 PM	Helium MFC set to  0.000000
10/16/2012	2:27:26 PM	H2 MFC set to  0.000000
10/16/2012	2:27:26 PM	BCl3 MFC set to  0.000000
10/16/2012	2:27:26 PM	PH3 MFC set to  0.000000
10/16/2012	2:27:26 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:27:26 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:27:26 PM	Tube furnace set to 0
10/16/2012	2:27:56 PM	H2 valve closed
10/16/2012	2:27:56 PM	BCl3 valve closed
10/16/2012	2:27:56 PM	PH3 valve closed
10/16/2012	2:27:56 PM	SiCl4 pre valve closed
10/16/2012	2:27:56 PM	SiCl4 post valve closed
10/16/2012	2:27:56 PM	Bypass valve closed
10/16/2012	2:27:56 PM	Bubbler valve closed
10/16/2012	2:27:56 PM	Helium valve opened
10/16/2012	2:27:56 PM	Main Vac valve opened
10/16/2012	2:27:56 PM	Helium MFC set to  20.000000
10/16/2012	2:27:56 PM	H2 MFC set to  0.000000
10/16/2012	2:27:56 PM	BCl3 MFC set to  0.000000
10/16/2012	2:27:56 PM	PH3 MFC set to  0.000000
10/16/2012	2:27:56 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:27:56 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:27:56 PM	Tube furnace set to 0
10/16/2012	2:28:26 PM	Helium valve closed
10/16/2012	2:28:27 PM	H2 valve closed
10/16/2012	2:28:27 PM	BCl3 valve closed
10/16/2012	2:28:27 PM	PH3 valve closed
10/16/2012	2:28:27 PM	SiCl4 pre valve closed
10/16/2012	2:28:27 PM	SiCl4 post valve closed
10/16/2012	2:28:27 PM	Bypass valve closed
10/16/2012	2:28:27 PM	Bubbler valve closed
10/16/2012	2:28:27 PM	Main Vac valve opened
10/16/2012	2:28:27 PM	Helium MFC set to  0.000000
10/16/2012	2:28:27 PM	H2 MFC set to  0.000000
10/16/2012	2:28:27 PM	BCl3 MFC set to  0.000000
10/16/2012	2:28:27 PM	PH3 MFC set to  0.000000
10/16/2012	2:28:27 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:28:27 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:28:27 PM	Tube furnace set to 0
10/16/2012	2:28:57 PM	H2 valve closed
10/16/2012	2:28:57 PM	BCl3 valve closed
10/16/2012	2:28:57 PM	PH3 valve closed
10/16/2012	2:28:57 PM	SiCl4 pre valve closed
10/16/2012	2:28:57 PM	SiCl4 post valve closed
10/16/2012	2:28:57 PM	Bypass valve closed
10/16/2012	2:28:57 PM	Bubbler valve closed
10/16/2012	2:28:57 PM	Helium valve opened
10/16/2012	2:28:57 PM	Main Vac valve opened
10/16/2012	2:28:57 PM	Helium MFC set to  20.000000
10/16/2012	2:28:57 PM	H2 MFC set to  0.000000
10/16/2012	2:28:57 PM	BCl3 MFC set to  0.000000
10/16/2012	2:28:57 PM	PH3 MFC set to  0.000000
10/16/2012	2:28:57 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:28:57 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:28:57 PM	Tube furnace set to 0
10/16/2012	2:29:27 PM	Helium valve closed
10/16/2012	2:29:27 PM	H2 valve closed
10/16/2012	2:29:27 PM	BCl3 valve closed
10/16/2012	2:29:27 PM	PH3 valve closed
10/16/2012	2:29:27 PM	SiCl4 pre valve closed
10/16/2012	2:29:27 PM	SiCl4 post valve closed
10/16/2012	2:29:27 PM	Bypass valve closed
10/16/2012	2:29:27 PM	Bubbler valve closed
10/16/2012	2:29:27 PM	Main Vac valve opened
10/16/2012	2:29:27 PM	Helium MFC set to  0.000000
10/16/2012	2:29:27 PM	H2 MFC set to  0.000000
10/16/2012	2:29:27 PM	BCl3 MFC set to  0.000000
10/16/2012	2:29:27 PM	PH3 MFC set to  0.000000
10/16/2012	2:29:27 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:29:27 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:29:27 PM	Tube furnace set to 0
10/16/2012	2:29:57 PM	H2 valve closed
10/16/2012	2:29:57 PM	BCl3 valve closed
10/16/2012	2:29:57 PM	PH3 valve closed
10/16/2012	2:29:57 PM	SiCl4 pre valve closed
10/16/2012	2:29:57 PM	SiCl4 post valve closed
10/16/2012	2:29:57 PM	Bypass valve closed
10/16/2012	2:29:57 PM	Bubbler valve closed
10/16/2012	2:29:57 PM	Helium valve opened
10/16/2012	2:29:57 PM	Main Vac valve opened
10/16/2012	2:29:57 PM	Helium MFC set to  20.000000
10/16/2012	2:29:57 PM	H2 MFC set to  0.000000
10/16/2012	2:29:57 PM	BCl3 MFC set to  0.000000
10/16/2012	2:29:57 PM	PH3 MFC set to  0.000000
10/16/2012	2:29:57 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:29:57 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:29:58 PM	Tube furnace set to 0
10/16/2012	2:30:28 PM	Helium valve closed
10/16/2012	2:30:28 PM	H2 valve closed
10/16/2012	2:30:28 PM	BCl3 valve closed
10/16/2012	2:30:28 PM	PH3 valve closed
10/16/2012	2:30:28 PM	SiCl4 pre valve closed
10/16/2012	2:30:28 PM	SiCl4 post valve closed
10/16/2012	2:30:28 PM	Bypass valve closed
10/16/2012	2:30:28 PM	Bubbler valve closed
10/16/2012	2:30:28 PM	Main Vac valve opened
10/16/2012	2:30:28 PM	Helium MFC set to  0.000000
10/16/2012	2:30:28 PM	H2 MFC set to  0.000000
10/16/2012	2:30:28 PM	BCl3 MFC set to  0.000000
10/16/2012	2:30:28 PM	PH3 MFC set to  0.000000
10/16/2012	2:30:28 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:30:28 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:30:28 PM	Tube furnace set to 200
10/16/2012	2:30:58 PM	H2 valve closed
10/16/2012	2:30:58 PM	BCl3 valve closed
10/16/2012	2:30:58 PM	PH3 valve closed
10/16/2012	2:30:58 PM	SiCl4 pre valve closed
10/16/2012	2:30:58 PM	SiCl4 post valve closed
10/16/2012	2:30:58 PM	Bypass valve closed
10/16/2012	2:30:58 PM	Bubbler valve closed
10/16/2012	2:30:58 PM	Helium valve opened
10/16/2012	2:30:58 PM	Main Vac valve opened
10/16/2012	2:30:58 PM	Helium MFC set to  20.000000
10/16/2012	2:30:58 PM	H2 MFC set to  0.000000
10/16/2012	2:30:58 PM	BCl3 MFC set to  0.000000
10/16/2012	2:30:58 PM	PH3 MFC set to  0.000000
10/16/2012	2:30:58 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:30:58 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:30:58 PM	Tube furnace set to 200
10/16/2012	2:31:28 PM	Helium valve closed
10/16/2012	2:31:28 PM	H2 valve closed
10/16/2012	2:31:28 PM	BCl3 valve closed
10/16/2012	2:31:28 PM	PH3 valve closed
10/16/2012	2:31:28 PM	SiCl4 pre valve closed
10/16/2012	2:31:28 PM	SiCl4 post valve closed
10/16/2012	2:31:28 PM	Bypass valve closed
10/16/2012	2:31:28 PM	Bubbler valve closed
10/16/2012	2:31:28 PM	Main Vac valve opened
10/16/2012	2:31:28 PM	Helium MFC set to  0.000000
10/16/2012	2:31:28 PM	H2 MFC set to  0.000000
10/16/2012	2:31:28 PM	BCl3 MFC set to  0.000000
10/16/2012	2:31:28 PM	PH3 MFC set to  0.000000
10/16/2012	2:31:28 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:31:28 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:31:28 PM	Tube furnace set to 200
10/16/2012	2:31:58 PM	H2 valve closed
10/16/2012	2:31:58 PM	BCl3 valve closed
10/16/2012	2:31:58 PM	PH3 valve closed
10/16/2012	2:31:58 PM	SiCl4 pre valve closed
10/16/2012	2:31:58 PM	SiCl4 post valve closed
10/16/2012	2:31:58 PM	Bypass valve closed
10/16/2012	2:31:58 PM	Bubbler valve closed
10/16/2012	2:31:58 PM	Helium valve opened
10/16/2012	2:31:58 PM	Main Vac valve opened
10/16/2012	2:31:58 PM	Helium MFC set to  20.000000
10/16/2012	2:31:58 PM	H2 MFC set to  0.000000
10/16/2012	2:31:58 PM	BCl3 MFC set to  0.000000
10/16/2012	2:31:58 PM	PH3 MFC set to  0.000000
10/16/2012	2:31:58 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:31:58 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:31:59 PM	Tube furnace set to 200
10/16/2012	2:32:29 PM	Helium valve closed
10/16/2012	2:32:29 PM	H2 valve closed
10/16/2012	2:32:29 PM	BCl3 valve closed
10/16/2012	2:32:29 PM	PH3 valve closed
10/16/2012	2:32:29 PM	SiCl4 pre valve closed
10/16/2012	2:32:29 PM	SiCl4 post valve closed
10/16/2012	2:32:29 PM	Bypass valve closed
10/16/2012	2:32:29 PM	Bubbler valve closed
10/16/2012	2:32:29 PM	Main Vac valve opened
10/16/2012	2:32:29 PM	Helium MFC set to  0.000000
10/16/2012	2:32:29 PM	H2 MFC set to  0.000000
10/16/2012	2:32:29 PM	BCl3 MFC set to  0.000000
10/16/2012	2:32:29 PM	PH3 MFC set to  0.000000
10/16/2012	2:32:29 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:32:29 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:32:29 PM	Tube furnace set to 200
10/16/2012	2:32:59 PM	H2 valve closed
10/16/2012	2:32:59 PM	BCl3 valve closed
10/16/2012	2:32:59 PM	PH3 valve closed
10/16/2012	2:32:59 PM	SiCl4 pre valve closed
10/16/2012	2:32:59 PM	SiCl4 post valve closed
10/16/2012	2:32:59 PM	Bypass valve closed
10/16/2012	2:32:59 PM	Bubbler valve closed
10/16/2012	2:32:59 PM	Helium valve opened
10/16/2012	2:32:59 PM	Main Vac valve opened
10/16/2012	2:32:59 PM	Helium MFC set to  20.000000
10/16/2012	2:32:59 PM	H2 MFC set to  0.000000
10/16/2012	2:32:59 PM	BCl3 MFC set to  0.000000
10/16/2012	2:32:59 PM	PH3 MFC set to  0.000000
10/16/2012	2:32:59 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:32:59 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:32:59 PM	Tube furnace set to 200
10/16/2012	2:33:29 PM	Helium valve closed
10/16/2012	2:33:29 PM	H2 valve closed
10/16/2012	2:33:29 PM	BCl3 valve closed
10/16/2012	2:33:29 PM	PH3 valve closed
10/16/2012	2:33:29 PM	SiCl4 pre valve closed
10/16/2012	2:33:29 PM	SiCl4 post valve closed
10/16/2012	2:33:29 PM	Bypass valve closed
10/16/2012	2:33:29 PM	Bubbler valve closed
10/16/2012	2:33:29 PM	Main Vac valve opened
10/16/2012	2:33:29 PM	Helium MFC set to  0.000000
10/16/2012	2:33:29 PM	H2 MFC set to  0.000000
10/16/2012	2:33:29 PM	BCl3 MFC set to  0.000000
10/16/2012	2:33:29 PM	PH3 MFC set to  0.000000
10/16/2012	2:33:29 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:33:29 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:33:29 PM	Tube furnace set to 200
10/16/2012	2:33:59 PM	H2 valve closed
10/16/2012	2:33:59 PM	BCl3 valve closed
10/16/2012	2:33:59 PM	PH3 valve closed
10/16/2012	2:33:59 PM	SiCl4 pre valve closed
10/16/2012	2:33:59 PM	SiCl4 post valve closed
10/16/2012	2:33:59 PM	Bypass valve closed
10/16/2012	2:33:59 PM	Bubbler valve closed
10/16/2012	2:33:59 PM	Helium valve opened
10/16/2012	2:33:59 PM	Main Vac valve opened
10/16/2012	2:33:59 PM	Helium MFC set to  20.000000
10/16/2012	2:33:59 PM	H2 MFC set to  0.000000
10/16/2012	2:33:59 PM	BCl3 MFC set to  0.000000
10/16/2012	2:34:00 PM	PH3 MFC set to  0.000000
10/16/2012	2:34:00 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:34:00 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:34:00 PM	Tube furnace set to 200
10/16/2012	2:34:30 PM	Helium valve closed
10/16/2012	2:34:30 PM	H2 valve closed
10/16/2012	2:34:30 PM	BCl3 valve closed
10/16/2012	2:34:30 PM	PH3 valve closed
10/16/2012	2:34:30 PM	SiCl4 pre valve closed
10/16/2012	2:34:30 PM	SiCl4 post valve closed
10/16/2012	2:34:30 PM	Bypass valve closed
10/16/2012	2:34:30 PM	Bubbler valve closed
10/16/2012	2:34:30 PM	Main Vac valve opened
10/16/2012	2:34:30 PM	Helium MFC set to  0.000000
10/16/2012	2:34:30 PM	H2 MFC set to  0.000000
10/16/2012	2:34:30 PM	BCl3 MFC set to  0.000000
10/16/2012	2:34:30 PM	PH3 MFC set to  0.000000
10/16/2012	2:34:30 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:34:30 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:34:30 PM	Tube furnace set to 200
10/16/2012	2:35:00 PM	H2 valve closed
10/16/2012	2:35:00 PM	BCl3 valve closed
10/16/2012	2:35:00 PM	PH3 valve closed
10/16/2012	2:35:00 PM	SiCl4 pre valve closed
10/16/2012	2:35:00 PM	SiCl4 post valve closed
10/16/2012	2:35:00 PM	Bypass valve closed
10/16/2012	2:35:00 PM	Bubbler valve closed
10/16/2012	2:35:00 PM	Helium valve opened
10/16/2012	2:35:00 PM	Main Vac valve opened
10/16/2012	2:35:00 PM	Helium MFC set to  20.000000
10/16/2012	2:35:00 PM	H2 MFC set to  0.000000
10/16/2012	2:35:00 PM	BCl3 MFC set to  0.000000
10/16/2012	2:35:00 PM	PH3 MFC set to  0.000000
10/16/2012	2:35:00 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:35:00 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:35:00 PM	Tube furnace set to 200
10/16/2012	2:35:30 PM	Helium valve closed
10/16/2012	2:35:30 PM	H2 valve closed
10/16/2012	2:35:30 PM	BCl3 valve closed
10/16/2012	2:35:30 PM	PH3 valve closed
10/16/2012	2:35:30 PM	SiCl4 pre valve closed
10/16/2012	2:35:30 PM	SiCl4 post valve closed
10/16/2012	2:35:30 PM	Bypass valve closed
10/16/2012	2:35:30 PM	Bubbler valve closed
10/16/2012	2:35:30 PM	Main Vac valve opened
10/16/2012	2:35:30 PM	Helium MFC set to  0.000000
10/16/2012	2:35:30 PM	H2 MFC set to  0.000000
10/16/2012	2:35:30 PM	BCl3 MFC set to  0.000000
10/16/2012	2:35:30 PM	PH3 MFC set to  0.000000
10/16/2012	2:35:30 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:35:30 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:35:30 PM	Tube furnace set to 200
10/16/2012	2:36:00 PM	H2 valve closed
10/16/2012	2:36:00 PM	BCl3 valve closed
10/16/2012	2:36:00 PM	PH3 valve closed
10/16/2012	2:36:00 PM	SiCl4 pre valve closed
10/16/2012	2:36:00 PM	SiCl4 post valve closed
10/16/2012	2:36:00 PM	Bypass valve closed
10/16/2012	2:36:00 PM	Bubbler valve closed
10/16/2012	2:36:00 PM	Helium valve opened
10/16/2012	2:36:00 PM	Main Vac valve opened
10/16/2012	2:36:00 PM	Helium MFC set to  20.000000
10/16/2012	2:36:00 PM	H2 MFC set to  0.000000
10/16/2012	2:36:00 PM	BCl3 MFC set to  0.000000
10/16/2012	2:36:01 PM	PH3 MFC set to  0.000000
10/16/2012	2:36:01 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:36:01 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:36:01 PM	Tube furnace set to 200
10/16/2012	2:36:31 PM	Helium valve closed
10/16/2012	2:36:31 PM	H2 valve closed
10/16/2012	2:36:31 PM	BCl3 valve closed
10/16/2012	2:36:31 PM	PH3 valve closed
10/16/2012	2:36:31 PM	SiCl4 pre valve closed
10/16/2012	2:36:31 PM	SiCl4 post valve closed
10/16/2012	2:36:31 PM	Bypass valve closed
10/16/2012	2:36:31 PM	Bubbler valve closed
10/16/2012	2:36:31 PM	Main Vac valve opened
10/16/2012	2:36:31 PM	Helium MFC set to  0.000000
10/16/2012	2:36:31 PM	H2 MFC set to  0.000000
10/16/2012	2:36:31 PM	BCl3 MFC set to  0.000000
10/16/2012	2:36:31 PM	PH3 MFC set to  0.000000
10/16/2012	2:36:31 PM	SiCl4 MFC set to  0.000000
10/16/2012	2:36:31 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	2:36:31 PM	Tube furnace set to 0
10/16/2012	2:36:32 PM	Run finished at 2:36 PM
10/16/2012	3:02:46 PM	Main Vac valve closed
10/16/2012	3:02:57 PM	Main Vac valve opened
10/16/2012	3:03:25 PM	Recipe started at 3:03 PM
10/16/2012	3:03:25 PM	Helium valve closed
10/16/2012	3:03:25 PM	H2 valve closed
10/16/2012	3:03:25 PM	BCl3 valve closed
10/16/2012	3:03:25 PM	PH3 valve closed
10/16/2012	3:03:25 PM	SiCl4 pre valve closed
10/16/2012	3:03:25 PM	SiCl4 post valve closed
10/16/2012	3:03:26 PM	Main Vac valve closed
10/16/2012	3:03:26 PM	Bypass valve closed
10/16/2012	3:03:26 PM	Bubbler valve closed
10/16/2012	3:03:26 PM	Helium MFC set to  0.000000
10/16/2012	3:03:26 PM	H2 MFC set to  0.000000
10/16/2012	3:03:26 PM	BCl3 MFC set to  0.000000
10/16/2012	3:03:26 PM	PH3 MFC set to  0.000000
10/16/2012	3:03:26 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:03:26 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:03:26 PM	Tube furnace set to 0
10/16/2012	3:03:29 PM	Helium valve closed
10/16/2012	3:03:29 PM	BCl3 valve closed
10/16/2012	3:03:29 PM	PH3 valve closed
10/16/2012	3:03:29 PM	SiCl4 pre valve closed
10/16/2012	3:03:29 PM	SiCl4 post valve closed
10/16/2012	3:03:29 PM	Main Vac valve closed
10/16/2012	3:03:29 PM	Bypass valve closed
10/16/2012	3:03:29 PM	Bubbler valve closed
10/16/2012	3:03:29 PM	H2 valve opened
10/16/2012	3:03:29 PM	Helium MFC set to  0.000000
10/16/2012	3:03:29 PM	H2 MFC set to  500.000000
10/16/2012	3:03:29 PM	BCl3 MFC set to  0.000000
10/16/2012	3:03:29 PM	PH3 MFC set to  0.000000
10/16/2012	3:03:29 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:03:29 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:03:29 PM	Tube furnace set to 0
10/16/2012	3:04:42 PM	Helium valve closed
10/16/2012	3:04:42 PM	BCl3 valve closed
10/16/2012	3:04:42 PM	PH3 valve closed
10/16/2012	3:04:42 PM	SiCl4 pre valve closed
10/16/2012	3:04:42 PM	SiCl4 post valve closed
10/16/2012	3:04:42 PM	Main Vac valve closed
10/16/2012	3:04:42 PM	Bypass valve closed
10/16/2012	3:04:42 PM	H2 valve opened
10/16/2012	3:04:42 PM	Bubbler valve opened
10/16/2012	3:04:42 PM	Helium MFC set to  0.000000
10/16/2012	3:04:42 PM	H2 MFC set to  500.000000
10/16/2012	3:04:42 PM	BCl3 MFC set to  0.000000
10/16/2012	3:04:42 PM	PH3 MFC set to  0.000000
10/16/2012	3:04:42 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:04:42 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:04:42 PM	Tube furnace set to 0
10/16/2012	3:04:43 PM	Helium valve closed
10/16/2012	3:04:43 PM	BCl3 valve closed
10/16/2012	3:04:43 PM	PH3 valve closed
10/16/2012	3:04:43 PM	SiCl4 pre valve closed
10/16/2012	3:04:43 PM	SiCl4 post valve closed
10/16/2012	3:04:43 PM	Main Vac valve closed
10/16/2012	3:04:43 PM	Bypass valve closed
10/16/2012	3:04:43 PM	H2 valve opened
10/16/2012	3:04:43 PM	Bubbler valve opened
10/16/2012	3:04:43 PM	Helium MFC set to  0.000000
10/16/2012	3:04:43 PM	H2 MFC set to  500.000000
10/16/2012	3:04:43 PM	BCl3 MFC set to  0.000000
10/16/2012	3:04:43 PM	PH3 MFC set to  0.000000
10/16/2012	3:04:43 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:04:43 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:04:43 PM	Tube furnace set to 1000
10/16/2012	3:24:43 PM	Helium valve closed
10/16/2012	3:24:43 PM	PH3 valve closed
10/16/2012	3:24:43 PM	Main Vac valve closed
10/16/2012	3:24:43 PM	Bypass valve closed
10/16/2012	3:24:43 PM	H2 valve opened
10/16/2012	3:24:43 PM	BCl3 valve opened
10/16/2012	3:24:43 PM	SiCl4 pre valve opened
10/16/2012	3:24:43 PM	SiCl4 post valve opened
10/16/2012	3:24:43 PM	Bubbler valve opened
10/16/2012	3:24:43 PM	Helium MFC set to  0.000000
10/16/2012	3:24:43 PM	H2 MFC set to  450.000000
10/16/2012	3:24:43 PM	BCl3 MFC set to  1.500000
10/16/2012	3:24:43 PM	PH3 MFC set to  0.000000
10/16/2012	3:24:43 PM	SiCl4 MFC set to  50.000000
10/16/2012	3:24:43 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:24:43 PM	Tube furnace set to 1000
10/16/2012	3:36:43 PM	Helium valve closed
10/16/2012	3:36:43 PM	BCl3 valve closed
10/16/2012	3:36:43 PM	PH3 valve closed
10/16/2012	3:36:43 PM	SiCl4 pre valve closed
10/16/2012	3:36:43 PM	SiCl4 post valve closed
10/16/2012	3:36:43 PM	Main Vac valve closed
10/16/2012	3:36:43 PM	Bypass valve closed
10/16/2012	3:36:43 PM	H2 valve opened
10/16/2012	3:36:43 PM	Bubbler valve opened
10/16/2012	3:36:43 PM	Helium MFC set to  0.000000
10/16/2012	3:36:43 PM	H2 MFC set to  500.000000
10/16/2012	3:36:43 PM	BCl3 MFC set to  0.000000
10/16/2012	3:36:44 PM	PH3 MFC set to  0.000000
10/16/2012	3:36:44 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:36:44 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:36:44 PM	Tube furnace set to 950
10/16/2012	3:38:44 PM	Helium valve closed
10/16/2012	3:38:44 PM	BCl3 valve closed
10/16/2012	3:38:44 PM	PH3 valve closed
10/16/2012	3:38:44 PM	SiCl4 pre valve closed
10/16/2012	3:38:44 PM	SiCl4 post valve closed
10/16/2012	3:38:44 PM	Main Vac valve closed
10/16/2012	3:38:44 PM	Bypass valve closed
10/16/2012	3:38:44 PM	H2 valve opened
10/16/2012	3:38:44 PM	Bubbler valve opened
10/16/2012	3:38:44 PM	Helium MFC set to  0.000000
10/16/2012	3:38:44 PM	H2 MFC set to  500.000000
10/16/2012	3:38:44 PM	BCl3 MFC set to  0.000000
10/16/2012	3:38:44 PM	PH3 MFC set to  0.000000
10/16/2012	3:38:44 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:38:44 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:38:44 PM	Tube furnace set to 900
10/16/2012	3:40:44 PM	Helium valve closed
10/16/2012	3:40:44 PM	BCl3 valve closed
10/16/2012	3:40:44 PM	PH3 valve closed
10/16/2012	3:40:44 PM	SiCl4 pre valve closed
10/16/2012	3:40:44 PM	SiCl4 post valve closed
10/16/2012	3:40:44 PM	Main Vac valve closed
10/16/2012	3:40:44 PM	Bypass valve closed
10/16/2012	3:40:44 PM	H2 valve opened
10/16/2012	3:40:44 PM	Bubbler valve opened
10/16/2012	3:40:44 PM	Helium MFC set to  0.000000
10/16/2012	3:40:44 PM	H2 MFC set to  500.000000
10/16/2012	3:40:44 PM	BCl3 MFC set to  0.000000
10/16/2012	3:40:44 PM	PH3 MFC set to  0.000000
10/16/2012	3:40:44 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:40:44 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:40:44 PM	Tube furnace set to 850
10/16/2012	3:42:44 PM	H2 valve closed
10/16/2012	3:42:44 PM	BCl3 valve closed
10/16/2012	3:42:44 PM	PH3 valve closed
10/16/2012	3:42:44 PM	SiCl4 pre valve closed
10/16/2012	3:42:44 PM	SiCl4 post valve closed
10/16/2012	3:42:44 PM	Main Vac valve closed
10/16/2012	3:42:44 PM	Bypass valve closed
10/16/2012	3:42:44 PM	Helium valve opened
10/16/2012	3:42:44 PM	Bubbler valve opened
10/16/2012	3:42:44 PM	Helium MFC set to  500.000000
10/16/2012	3:42:44 PM	H2 MFC set to  0.000000
10/16/2012	3:42:44 PM	BCl3 MFC set to  0.000000
10/16/2012	3:42:44 PM	PH3 MFC set to  0.000000
10/16/2012	3:42:44 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:42:44 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:42:44 PM	Tube furnace set to 800
10/16/2012	3:44:44 PM	H2 valve closed
10/16/2012	3:44:44 PM	BCl3 valve closed
10/16/2012	3:44:44 PM	PH3 valve closed
10/16/2012	3:44:44 PM	SiCl4 pre valve closed
10/16/2012	3:44:44 PM	SiCl4 post valve closed
10/16/2012	3:44:44 PM	Main Vac valve closed
10/16/2012	3:44:44 PM	Bypass valve closed
10/16/2012	3:44:44 PM	Helium valve opened
10/16/2012	3:44:44 PM	Bubbler valve opened
10/16/2012	3:44:44 PM	Helium MFC set to  500.000000
10/16/2012	3:44:44 PM	H2 MFC set to  0.000000
10/16/2012	3:44:44 PM	BCl3 MFC set to  0.000000
10/16/2012	3:44:44 PM	PH3 MFC set to  0.000000
10/16/2012	3:44:44 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:44:44 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:44:45 PM	Tube furnace set to 750
10/16/2012	3:46:45 PM	H2 valve closed
10/16/2012	3:46:45 PM	BCl3 valve closed
10/16/2012	3:46:45 PM	PH3 valve closed
10/16/2012	3:46:45 PM	SiCl4 pre valve closed
10/16/2012	3:46:45 PM	SiCl4 post valve closed
10/16/2012	3:46:45 PM	Main Vac valve closed
10/16/2012	3:46:45 PM	Bypass valve closed
10/16/2012	3:46:45 PM	Helium valve opened
10/16/2012	3:46:45 PM	Bubbler valve opened
10/16/2012	3:46:45 PM	Helium MFC set to  500.000000
10/16/2012	3:46:45 PM	H2 MFC set to  0.000000
10/16/2012	3:46:45 PM	BCl3 MFC set to  0.000000
10/16/2012	3:46:45 PM	PH3 MFC set to  0.000000
10/16/2012	3:46:45 PM	SiCl4 MFC set to  0.000000
10/16/2012	3:46:45 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	3:46:45 PM	Tube furnace set to 0
10/16/2012	4:06:45 PM	Helium valve closed
10/16/2012	4:06:45 PM	H2 valve closed
10/16/2012	4:06:45 PM	BCl3 valve closed
10/16/2012	4:06:45 PM	PH3 valve closed
10/16/2012	4:06:45 PM	SiCl4 pre valve closed
10/16/2012	4:06:45 PM	SiCl4 post valve closed
10/16/2012	4:06:45 PM	Main Vac valve closed
10/16/2012	4:06:45 PM	Bypass valve closed
10/16/2012	4:06:45 PM	Bubbler valve closed
10/16/2012	4:06:45 PM	Helium MFC set to  0.000000
10/16/2012	4:06:45 PM	H2 MFC set to  0.000000
10/16/2012	4:06:45 PM	BCl3 MFC set to  0.000000
10/16/2012	4:06:45 PM	PH3 MFC set to  0.000000
10/16/2012	4:06:45 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:06:45 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:06:45 PM	Tube furnace set to 0
10/16/2012	4:06:46 PM	Helium valve closed
10/16/2012	4:06:46 PM	H2 valve closed
10/16/2012	4:06:46 PM	BCl3 valve closed
10/16/2012	4:06:46 PM	PH3 valve closed
10/16/2012	4:06:46 PM	SiCl4 pre valve closed
10/16/2012	4:06:46 PM	SiCl4 post valve closed
10/16/2012	4:06:46 PM	Main Vac valve closed
10/16/2012	4:06:46 PM	Bubbler valve closed
10/16/2012	4:06:46 PM	Bypass valve opened
10/16/2012	4:06:46 PM	Helium MFC set to  0.000000
10/16/2012	4:06:46 PM	H2 MFC set to  0.000000
10/16/2012	4:06:46 PM	BCl3 MFC set to  0.000000
10/16/2012	4:06:46 PM	PH3 MFC set to  0.000000
10/16/2012	4:06:46 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:06:46 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:06:46 PM	Tube furnace set to 0
10/16/2012	4:08:00 PM	Helium valve closed
10/16/2012	4:08:00 PM	H2 valve closed
10/16/2012	4:08:00 PM	BCl3 valve closed
10/16/2012	4:08:00 PM	PH3 valve closed
10/16/2012	4:08:00 PM	SiCl4 pre valve closed
10/16/2012	4:08:00 PM	SiCl4 post valve closed
10/16/2012	4:08:00 PM	Main Vac valve closed
10/16/2012	4:08:00 PM	Bubbler valve closed
10/16/2012	4:08:00 PM	Bypass valve opened
10/16/2012	4:08:00 PM	Helium MFC set to  0.000000
10/16/2012	4:08:00 PM	H2 MFC set to  0.000000
10/16/2012	4:08:00 PM	BCl3 MFC set to  0.000000
10/16/2012	4:08:00 PM	PH3 MFC set to  0.000000
10/16/2012	4:08:00 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:08:00 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:08:00 PM	Tube furnace set to 0
10/16/2012	4:09:00 PM	Helium valve closed
10/16/2012	4:09:00 PM	H2 valve closed
10/16/2012	4:09:00 PM	BCl3 valve closed
10/16/2012	4:09:00 PM	PH3 valve closed
10/16/2012	4:09:00 PM	SiCl4 pre valve closed
10/16/2012	4:09:00 PM	SiCl4 post valve closed
10/16/2012	4:09:00 PM	Bypass valve closed
10/16/2012	4:09:00 PM	Bubbler valve closed
10/16/2012	4:09:00 PM	Main Vac valve opened
10/16/2012	4:09:00 PM	Helium MFC set to  0.000000
10/16/2012	4:09:00 PM	H2 MFC set to  0.000000
10/16/2012	4:09:00 PM	BCl3 MFC set to  0.000000
10/16/2012	4:09:00 PM	PH3 MFC set to  0.000000
10/16/2012	4:09:00 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:09:00 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:09:01 PM	Tube furnace set to 0
10/16/2012	4:09:02 PM	Run finished at 4:09 PM
10/16/2012	4:44:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2012	4:44:23 PM	Recipe started at 4:44 PM
10/16/2012	4:44:23 PM	Helium valve closed
10/16/2012	4:44:23 PM	H2 valve closed
10/16/2012	4:44:23 PM	BCl3 valve closed
10/16/2012	4:44:23 PM	PH3 valve closed
10/16/2012	4:44:23 PM	SiCl4 pre valve closed
10/16/2012	4:44:23 PM	SiCl4 post valve closed
10/16/2012	4:44:23 PM	Main Vac valve closed
10/16/2012	4:44:23 PM	Bypass valve closed
10/16/2012	4:44:23 PM	Bubbler valve closed
10/16/2012	4:44:23 PM	Helium MFC set to  0.000000
10/16/2012	4:44:23 PM	H2 MFC set to  0.000000
10/16/2012	4:44:23 PM	BCl3 MFC set to  0.000000
10/16/2012	4:44:23 PM	PH3 MFC set to  0.000000
10/16/2012	4:44:23 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:44:23 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:44:23 PM	Tube furnace set to 0
10/16/2012	4:44:26 PM	H2 valve closed
10/16/2012	4:44:26 PM	BCl3 valve closed
10/16/2012	4:44:26 PM	PH3 valve closed
10/16/2012	4:44:26 PM	SiCl4 pre valve closed
10/16/2012	4:44:26 PM	SiCl4 post valve closed
10/16/2012	4:44:26 PM	Main Vac valve closed
10/16/2012	4:44:26 PM	Bypass valve closed
10/16/2012	4:44:26 PM	Bubbler valve closed
10/16/2012	4:44:26 PM	Helium valve opened
10/16/2012	4:44:27 PM	Helium MFC set to  500.000000
10/16/2012	4:44:27 PM	H2 MFC set to  0.000000
10/16/2012	4:44:27 PM	BCl3 MFC set to  0.000000
10/16/2012	4:44:27 PM	PH3 MFC set to  0.000000
10/16/2012	4:44:27 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:44:27 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:44:27 PM	Tube furnace set to 0
10/16/2012	4:45:39 PM	Helium valve closed
10/16/2012	4:45:39 PM	H2 valve closed
10/16/2012	4:45:39 PM	BCl3 valve closed
10/16/2012	4:45:39 PM	PH3 valve closed
10/16/2012	4:45:39 PM	SiCl4 pre valve closed
10/16/2012	4:45:39 PM	SiCl4 post valve closed
10/16/2012	4:45:39 PM	Main Vac valve closed
10/16/2012	4:45:39 PM	Bypass valve closed
10/16/2012	4:45:39 PM	Bubbler valve closed
10/16/2012	4:45:39 PM	Helium MFC set to  0.000000
10/16/2012	4:45:40 PM	H2 MFC set to  0.000000
10/16/2012	4:45:40 PM	BCl3 MFC set to  0.000000
10/16/2012	4:45:40 PM	PH3 MFC set to  0.000000
10/16/2012	4:45:40 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:45:40 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:45:40 PM	Tube furnace set to 0
10/16/2012	4:45:41 PM	Run finished at 4:45 PM
10/16/2012	4:45:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2012	4:47:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2012	4:47:08 PM	Recipe started at 4:47 PM
10/16/2012	4:47:08 PM	Helium valve closed
10/16/2012	4:47:08 PM	H2 valve closed
10/16/2012	4:47:08 PM	BCl3 valve closed
10/16/2012	4:47:08 PM	PH3 valve closed
10/16/2012	4:47:08 PM	SiCl4 pre valve closed
10/16/2012	4:47:08 PM	SiCl4 post valve closed
10/16/2012	4:47:09 PM	Main Vac valve closed
10/16/2012	4:47:09 PM	Bubbler valve closed
10/16/2012	4:47:09 PM	Bypass valve opened
10/16/2012	4:47:09 PM	Helium MFC set to  0.000000
10/16/2012	4:47:09 PM	H2 MFC set to  0.000000
10/16/2012	4:47:09 PM	BCl3 MFC set to  0.000000
10/16/2012	4:47:09 PM	PH3 MFC set to  0.000000
10/16/2012	4:47:09 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:47:09 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:47:09 PM	Tube furnace set to 0
10/16/2012	4:48:53 PM	Helium valve closed
10/16/2012	4:48:53 PM	H2 valve closed
10/16/2012	4:48:53 PM	BCl3 valve closed
10/16/2012	4:48:53 PM	PH3 valve closed
10/16/2012	4:48:53 PM	SiCl4 pre valve closed
10/16/2012	4:48:53 PM	SiCl4 post valve closed
10/16/2012	4:48:53 PM	Main Vac valve closed
10/16/2012	4:48:53 PM	Bubbler valve closed
10/16/2012	4:48:53 PM	Bypass valve opened
10/16/2012	4:48:53 PM	Helium MFC set to  0.000000
10/16/2012	4:48:53 PM	H2 MFC set to  0.000000
10/16/2012	4:48:53 PM	BCl3 MFC set to  0.000000
10/16/2012	4:48:53 PM	PH3 MFC set to  0.000000
10/16/2012	4:48:53 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:48:53 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:48:53 PM	Tube furnace set to 0
10/16/2012	4:49:53 PM	Helium valve closed
10/16/2012	4:49:53 PM	H2 valve closed
10/16/2012	4:49:53 PM	BCl3 valve closed
10/16/2012	4:49:53 PM	PH3 valve closed
10/16/2012	4:49:53 PM	SiCl4 pre valve closed
10/16/2012	4:49:53 PM	SiCl4 post valve closed
10/16/2012	4:49:53 PM	Bypass valve closed
10/16/2012	4:49:53 PM	Bubbler valve closed
10/16/2012	4:49:53 PM	Main Vac valve opened
10/16/2012	4:49:53 PM	Helium MFC set to  0.000000
10/16/2012	4:49:53 PM	H2 MFC set to  0.000000
10/16/2012	4:49:53 PM	BCl3 MFC set to  0.000000
10/16/2012	4:49:53 PM	PH3 MFC set to  0.000000
10/16/2012	4:49:53 PM	SiCl4 MFC set to  0.000000
10/16/2012	4:49:53 PM	Bypass solenoid MFC set to  0.000000
10/16/2012	4:49:53 PM	Tube furnace set to 0
10/16/2012	4:49:54 PM	Run finished at 4:49 PM
10/16/2012	4:49:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
